Cott, DaireDaireCottMasahito, SugiuraSugiuraMasahitoVanpaemel, JohannesJohannesVanpaemelvan der Veen, MarleenMarleenvan der VeenTokei, ZsoltZsoltTokeiVereecken, PhilippePhilippeVereecken2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22178Low temperature CNT growth for BEOL interconnectsOral presentation