Enabling Logic with Backside Connectivity via n-TSVs and its Potential as a Scaling Booster

Veloso, AnabelaAnabelaVelosoJourdain, AnneAnneJourdainHiblot, GaspardGaspardHiblotSchleicher, FilipFilipSchleicherD'have, KoenKoenD'haveSebaai, FaridFaridSebaaiRadisic, DunjaDunjaRadisicLoo, RogerRogerLooHopf, TobyTobyHopfDe Keersgieter, AnAnDe KeersgieterArimura, HiroakiHiroakiArimuraEneman, GeertGeertEnemanFavia, PaolaPaolaFaviaGeypen, JefJefGeypenArutchelvan, GouthamGouthamArutchelvanVaisman Chasin, AdrianAdrianVaisman ChasinJang, DoyoungDoyoungJangNyns, LauraLauraNynsRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyMannaert, GeertGeertMannaertChan, BTBTChanDevriendt, KatiaKatiaDevriendtDemuynck, StevenStevenDemuynckVan der Plas, GeertGeertVan der PlasRyckaert, JulienJulienRyckaertBeyer, GeraldGeraldBeyerDentoni Litta, EugenioEugenioDentoni LittaBeyne, EricEricBeyneHoriguchi, NaotoNaotoHoriguchi2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37335Enabling Logic with Backside Connectivity via n-TSVs and its Potential as a Scaling BoosterProceedings paperhttps://ieeexplore.ieee.org/document/9508684