In-situ fabrication of micro-optical elements in transparent encapsulants with excimer laser-ablation

Naessens, KrisKrisNaessensBockstaele, R.R.BockstaeleRits, OlivierOlivierRitsBaets, RoelRoelBaets2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10921In-situ fabrication of micro-optical elements in transparent encapsulants with excimer laser-ablationProceedings paper