Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseDe Wolf, PeterPeterDe WolfTrenkler, ThomasThomasTrenklerHantschel, ThomasThomasHantschelStephenson, RobertRobertStephenson2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3090Dopant/carrier profiling for ULSIJournal article