Maskless fabrication of high density silicon nan-pin structures with carbon nano clusters acting as mask for subsequent microwave silicon etching

Yanovich, S.S.YanovichBaklanov, MikhaïlMikhaïlBaklanovGushchin, O.O.GushchinGornev, E.E.GornevDanila, A.A.Danila2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21876Maskless fabrication of high density silicon nan-pin structures with carbon nano clusters acting as mask for subsequent microwave silicon etchingMeeting abstract