Renaud, MichaelMichaelRenaudAltena, GeertGeertAltenaGoedbloed, MartijnMartijnGoedbloedde Nooijer, ChristineChristinede NooijerMatova, SvetlaSvetlaMatovaNaito, Y.Y.NaitoYamakawa, T.T.YamakawaTakeuchi, H.H.TakeuchiOnishi, K.K.Onishivan Schaijk, RobRobvan Schaijk2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22993A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electretProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6626861&queryText%3DA+HIGH+PERFORMANCE+ELECTROSTATIC+MEMS+VIBRATI