Critical material properties for pattern collapse mitigation

Winroth, GustafGustafWinrothYounkin, ToddToddYounkinBlackwell, James M.James M.BlackwellGronheid, RoelRoelGronheid2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21855Critical material properties for pattern collapse mitigationProceedings paper