Xu, KaidongKaidongXuVos, RitaRitaVosArnauts, SophiaSophiaArnautsLux, MarcelMarcelLuxSchaetzlein, W.W.SchaetzleinSpeh, U.U.SpehMertens, PaulPaulMertensHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7066Optimization of a brush scrubber for nano-sized particlesProceedings paper