Mantl, S.S.MantlBuca, D.D.BucaHolländer, B.B.HolländerMörschbächer, M.M.MörschbächerTrinkhaus, H.H.TrinkhausLuysberg, M.M.LuysbergHueging, N.N.HuegingHouben, L.L.HoubenCarius, R.R.CariusLoo, RogerRogerLooCaymax, MattyMattyCaymaxSchäfer, H.H.Schäfer2021-10-152021-10-152004-10https://imec-publications.be/handle/20.500.12860/9262Strained Si on relaxed SiGe made by ion implantation and strain transferProceedings paper