Design and fabrication of a two layer thin film interconnection system on glass for use in a parallel free-space optical interconnection demonstrator

Lernout, JoJoLernoutVanfleteren, JanJanVanfleterenVan Calster, AndreAndreVan CalsterVanwassenhove, LucLucVanwassenhoveVan Daele, P.P.Van Daele2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2719Design and fabrication of a two layer thin film interconnection system on glass for use in a parallel free-space optical interconnection demonstratorProceedings paper