Deng, KerongKerongDengErofeev, IvanIvanErofeevChowdhuri, Angshuman RayAngshuman RayChowdhuriPhilipsen, HaroldHaroldPhilipsenAabdin, ZainulZainulAabdinHartanto, Antony WinataAntony WinataHartantoTjiu, Weng WeeiWeng WeeiTjiuZhang, MingshengMingshengZhangFernando, DevshanDevshanFernandoSaidov, KhakimjonKhakimjonSaidovKumar, KrishnaKrishnaKumarPacco, AntoineAntoinePaccoHolsteyns, FrankFrankHolsteynsHuynh, Han VinhHan VinhHuynhMirsaidov, UtkurUtkurMirsaidov2025-04-292024-10-302025-04-2920241613-6810WOS:001337998600001https://imec-publications.be/handle/20.500.12860/44702Nanoscale Wet Etching of Molybdenum Interconnects with Organic SolutionsJournal article10.1002/smll.202406713WOS:001337998600001AMMONIUM-NITRATEDISSOLUTIONTECHNOLOGYMECHANISMKINETICSMETALSMEDLINE:39439137