Claeys, CorCorClaeysHe, LiangLiangHeO'Sullivan, BarryBarryO'SullivanVeloso, AnabelaAnabelaVelosoHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertSimoen, EddyEddySimoen2021-10-252021-10-2520182162-8769https://imec-publications.be/handle/20.500.12860/30439Low frequency noise analysis of impact of metal gate Processing on the gate oxide stack qualityJournal articlehttp://jss.ecsdl.org/content/7/3/Q26.abstract