Beyer, GeraldGeraldBeyerCiofi, IvanIvanCiofiVan Olmen, JanJanVan OlmenCarbonell, LaureLaureCarbonellVersluijs, JankoJankoVersluijsWiaux, VincentVincentWiauxOp de Beeck, MaaikeMaaikeOp de BeeckMaenhoudt, MireilleMireilleMaenhoudtStruyf, HerbertHerbertStruyfHendrickx, DirkDirkHendrickxde Marneffe, Jean-FrancoisJean-Francoisde MarneffeVereecke, GuyGuyVereeckeClaes, MartineMartineClaesBearda, TwanTwanBeardaVolders, HennyHennyVoldersHeylen, NancyNancyHeylenTravaly, YoussefYoussefTravalyStucchi, MicheleMicheleStucchiTokei, ZsoltZsoltTokeiCartuyvels, RudiRudiCartuyvels2021-10-172021-10-172008-121355-8633https://imec-publications.be/handle/20.500.12860/13380CMOS 32nm technology node: business as usual for interconnect damascene patterning?Journal article