UV-based nano imprint fabrication of gold grating couplers on silicon-on-insulator

Scheerlinck, StijnStijnScheerlinckVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-07https://imec-publications.be/handle/20.500.12860/12851UV-based nano imprint fabrication of gold grating couplers on silicon-on-insulatorProceedings paper