Lieten, RubenRubenLietenDouhard, BastienBastienDouhardStesmans, AndreAndreStesmansJivanescu, MMJivanescuBeeman, J.W.J.W.BeemanSimoen, EddyEddySimoenVandervorst, WilfriedWilfriedVandervorstHaller, EugeneEugeneHallerLocquet, Jean-PierreJean-PierreLocquet2021-10-212021-10-2120132162-8769https://imec-publications.be/handle/20.500.12860/22695Implantation and activation of phosphorus in amorphous and crystalline germanium layersJournal articlehttp://dx.doi.org/10.1149/2.011309jss