Makhotkin, IgorIgorMakhotkinWu, MeiyiMeiyiWuSoltwisch, V.V.SoltwischScholze, F.F.ScholzePhilipsen, VickyVickyPhilipsen2022-02-222022-02-2220211084-7529WOS:000636648200004https://imec-publications.be/handle/20.500.12860/38987Refined extreme ultraviolet mask stack modelJournal article10.1364/JOSAA.416235WOS:000636648200004MULTILAYERSMEDLINE:33798178