Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)

Franquet, AlexisAlexisFranquetConard, ThierryThierryConardHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18929Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)Meeting abstract