Growing GaN Epi layers on 200 mm silicon substrates for LED applications

Cheng, KaiKaiChengDekoster, JohanJohanDekosterJun, Sung WonSung WonJunDel-Agua-Borniquel, Jose-IgnacioJose-IgnacioDel-Agua-Borniquel2021-10-192021-10-192011-07https://imec-publications.be/handle/20.500.12860/18671Growing GaN Epi layers on 200 mm silicon substrates for LED applicationsJournal article