Probing electrical properties of semiconductor structures on the nm-scale with SSRM

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenMody, JayJayModyVanhaeren, DanielleDanielleVanhaerenSchulze, AndreasAndreasSchulze2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16424Probing electrical properties of semiconductor structures on the nm-scale with SSRMOral presentation