Vibrational spectroscopy of low-k films: exploring the potentiality of μ-Raman characterization

Clemente, FrancescaFrancescaClementeBaklanov, MikhaïlMikhaïlBaklanovUrbanowicz, AdamAdamUrbanowiczHantschel, ThomasThomasHantschel2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15115Vibrational spectroscopy of low-k films: exploring the potentiality of μ-Raman characterizationMeeting abstract