X-ray microdiffraction study on crystallinity of micron-sized Ge films selectively grown on Si(001) substrates

Ebihara, K.K.EbiharaHarada, S.S.HaradaKikkawa, J.J.KikkawaNakamura, Y.Y.NakamuraSakai, A.A.SakaiWang, GangGangWangCaymax, MattyMattyCaymaxImai, Y.Y.ImaiKimura, S.S.KimuraSakata, O.O.Sakata2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17058X-ray microdiffraction study on crystallinity of micron-sized Ge films selectively grown on Si(001) substratesMeeting abstract