In-situ characterization of the oxidation degree of the sputter surface and the oxygen enhancement of the ionization probability of Si

Janssens, TomTomJanssensVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4450In-situ characterization of the oxidation degree of the sputter surface and the oxygen enhancement of the ionization probability of SiOral presentation