On the activation mechanisms of sub-melt laser anneals

Clarysse, TrudoTrudoClarysseBogdanowicz, JanuszJanuszBogdanowiczGoossens, JozefienJozefienGoossensMoussa, AlainAlainMoussaRosseel, ErikErikRosseelVandervorst, WilfriedWilfriedVandervorstPetersen, D.H.D.H.PetersenLin, R.R.LinNielsen, P.F.P.F.NielsenHansen, O.O.HansenDefranoux, C.C.DefranouxVertikov, A.A.VertikovGostein, M.M.GosteinBennett, N.S.N.S.BennettCowern, N.E.B.N.E.B.CowernFaifer, V.N.V.N.Faifer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13538On the activation mechanisms of sub-melt laser annealsMeeting abstract