Kang, SeulkiSeulkiKangMiura, YujiYujiMiuraMaruyama, KotaroKotaroMaruyamaYamazaki, YuichiroYuichiroYamazakiWei, Chih-, IChih-, IWeiMaguire, EthanEthanMaguireFenger, GermainGermainFengerDe Bisschop, PeterPeterDe BisschopDas, SayantanSayantanDasHalder, SandipSandipHalderLorusso, GianGianLorusso2023-06-022022-09-082023-06-022022978-1-5106-4981-10277-786XWOS:000844549800033https://imec-publications.be/handle/20.500.12860/40382E-beam metrology-based EUVL aberration monitoringProceedings paper10.1117/12.2615955978-1-5106-4982-8WOS:000844549800033