Continued scalability of copper/low-k interconnects

Brongersma, SywertSywertBrongersmaCarbonell, LaureLaureCarbonellVanstreels, KrisKrisVanstreelsIacopi, FrancescaFrancescaIacopiD'Haen, JanJanD'HaenZhang, WenqiWenqiZhangTravaly, YoussefYoussefTravalyDemuynck, StevenStevenDemuynckTokei, ZsoltZsoltTokeiDe Ceuninck, WardWardDe CeuninckMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10162Continued scalability of copper/low-k interconnectsOral presentation