Hassani, Faezeh ArabFaezeh ArabHassaniDupre, CeciliaCeciliaDupreOllier, EricEricOllierCobianu, CornelCornelCobianuArmini, SilviaSilviaArminiCherman, VladimirVladimirChermanIonescu, Adrian MihaiAdrian MihaiIonescuTsuchiya, YoshishigeYoshishigeTsuchiyaMizuta, HiroshiHiroshiMizuta2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22462Mass-detection based in-plane resonant nano-electro-mechanical sensorsOral presentation