Elastic relaxation evaluation in SiGe/Si hetero-epitaxial structures

Bargallo Gonzalez, MireiaMireiaBargallo GonzalezNaka, N.N.NakaHikavyy, AndriyAndriyHikavyyEneman, GeertGeertEnemanLoo, RogerRogerLooSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18530Elastic relaxation evaluation in SiGe/Si hetero-epitaxial structuresMeeting abstract