Fundamental study of nanoscale processes for the integration of carbon nanotubes in IC interconnects

Vereecken, PhilippeDe Gendt, StefanVanpaemel, JohannesJohannesVanpaemel2026-05-282026-05-282014-12https://imec-publications.be/handle/20.500.12860/59477Fundamental study of nanoscale processes for the integration of carbon nanotubes in IC interconnectsPHD thesis