Cu contact technology for sub-100nm contacts

Demuynck, StevenStevenDemuynckZhao, ChaoChaoZhaoHinomura, ToruToruHinomuraTokei, ZsoltZsoltTokeiVan den Bosch, GeertGeertVan den BoschBeyer, GeraldGeraldBeyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12051Cu contact technology for sub-100nm contactsOral presentation