Electron spin resonance observation of Si dangling bond type defects at the interface (100)Si and ultrathin stacks of SiO2, Al2O3, and ZrO2

Stesmans, AndreAndreStesmansAfanas'ev, V. V.V. V.Afanas'evHoussa, MichelMichelHoussa2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5676Electron spin resonance observation of Si dangling bond type defects at the interface (100)Si and ultrathin stacks of SiO2, Al2O3, and ZrO2Oral presentation