Surface and grain boundary scattering studied in beveled polycrystalline thin copper films

Zhang, WenqiWenqiZhangBrongersma, SywertSywertBrongersmaClarysse, TrudoTrudoClarysseTerzieva, ValentinaValentinaTerzievaRosseel, ErikErikRosseelVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9973Surface and grain boundary scattering studied in beveled polycrystalline thin copper filmsJournal article