Wang, JunJunWangAlnazer, MohamedMohamedAlnazerPalombizio, AntonioAntonioPalombizioMajeed, BivraghBivraghMajeedPaneri, AbhilashAbhilashPaneri2024-07-152024-07-152024-09-04Not applicablehttps://imec-publications.be/handle/20.500.12860/44159Cell-targeted drug delivery is a crucial aspect of modern-day medicine which ensures optimal utilization of implemented therapeutic agents. Nanoneedles has been touted as an ideal vehicle for cellular drug delivery owing to their small diameter (sub-100 nm), which once coated with target payload, can be introduced into cell of interest without risking cyto-toxicity. Because of their fragile nature, wafer-level fabrication process for such high aspect ratio nanoneedles is a challenge. In this study, we present fabrication scheme of a two-step needle with total height of 30 um and aspect ratio of over 30 for the narrow part (tip) of the needle. This fabrication was done in a running 200 mm pilot line and exhibited high wafer level yieldMeeting abstract10.7567/SSDM.2024.C-6-02Engineering