Cheng, KaiKaiChengDegroote, StefanStefanDegrooteLeys, MaartenMaartenLeysMedjdoub, FaridFaridMedjdoubDerluyn, JoffJoffDerluynSijmus, BramBramSijmusGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-192021-10-1920110022-0248https://imec-publications.be/handle/20.500.12860/18669AlN/GaN heterostructures grown by metal organic vapor phase epitaxy with in situ Si3N4 passivationJournal article