Maex, KarenKarenMaexTokei, ZsoltZsoltTokeiSatta, AlessandraAlessandraSattaLanckmans, FilipFilipLanckmansWu, WenWenWuIacopi, FrancescaFrancescaIacopi2021-10-142021-10-1420011355-8633https://imec-publications.be/handle/20.500.12860/5926Barriers for Cu/low k damascene structuresJournal article