The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure

Chang, ShaneShaneChangZhao, MingMingZhaoSpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetHein, DoDoHeinUedono, AkiraAkiraUedonoTien Tung, LuongLuongTien TungWang, Tsang HsuanTsang HsuanWangLi, ChangChangLi2021-10-282021-10-2820201862-6300https://imec-publications.be/handle/20.500.12860/34880The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structureJournal articlehttps://doi.org/10.1002/pssa.201900755