Kittl, JorgeJorgeKittlLauwers, AnneAnneLauwersChamirian, OxanaOxanaChamirianKmieciak, MalgorzataMalgorzataKmieciakVan Dal, MarkMarkVan DalVeloso, AnabelaAnabelaVelosoKottantharayil, AnilAnilKottantharayilPourtois, GeoffreyGeoffreyPourtoisde Potter de ten Broeck, MurielMurielde Potter de ten BroeckMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10699Silicides - Recent advances and prospectsBook chapter