A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

Padovani, AndreaAndreaPadovaniKaczer, BenBenKaczerPesic, MilanMilanPesicBelmonte, AttilioAttilioBelmontePopovici, Mihaela IoanaMihaela IoanaPopoviciNyns, LauraLauraNynsLinten, DimitriDimitriLintenAfanasiev, ValeriValeriAfanasievShlyakhov, IlyaIlyaShlyakhovLee, YounggonYounggonLeePark, HokyungHokyungParkLarcher, LucaLucaLarcher2021-10-272021-10-2720190018-9383https://imec-publications.be/handle/20.500.12860/33720A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurementsJournal articlehttps://ieeexplore.ieee.org/document/8660699