Stephenson, RobertRobertStephensonVerhulst, AnneAnneVerhulstDe Wolf, PeterPeterDe WolfCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4772Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samplesJournal article