Influence of the novel anchor design on the shear strength of poly-SiGe thin film wafer level packages

Claes, GertGertClaesSeveri, SimoneSimoneSeveriVan Hoof, RitaRitaVan HoofDecoutere, StefaanStefaanDecoutereCelis, Jean-PierreJean-PierreCelisWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16879Influence of the novel anchor design on the shear strength of poly-SiGe thin film wafer level packagesProceedings paper