Integration aspects of post-porosity low-k protection using PMMA sacrificial filler

Zhang, LipingLipingZhangde Marneffe, Jean-FrancoisJean-Francoisde MarneffeWen, Liang GongLiang GongWenWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokeiBoemmels, JuergenJuergenBoemmelsDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27664Integration aspects of post-porosity low-k protection using PMMA sacrificial fillerMeeting abstract