Nyns, LauraLauraNynsShi, XiaopingXiaopingShiTielens, HildeHildeTielensVan Elshocht, SvenSvenVan ElshochtDate, LucienLucienDateSchreutelkamp, RobRobSchreutelkamp2021-10-202021-10-2020120734-2101https://imec-publications.be/handle/20.500.12860/21214Impact of precursor chemistry on atomic layer deposition of lutetium aluminatesJournal article