Vereecke, GuyGuyVereeckeParton, ElsElsPartonHolsteyns, FrankFrankHolsteynsXu, KKXuVos, RitaRitaVosMertens, PaulPaulMertensSchmidt, M.O.M.O.SchmidtBauer, T.T.Bauer2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9861Investigating the role of gas cavitation in megasonic nanoparticle removalJournal article