Li, YunlongYunlongLiVan Huylenbroeck, StefaanStefaanVan HuylenbroeckRoussel, PhilippePhilippeRousselBrouri, MohandMohandBrouriGopinath, SanjajSanjajGopinathM. Anjos, DanielaDanielaM. AnjosThorum, MatthewMatthewThorumYu, JengyiJengyiYuBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneCroes, KristofKristofCroes2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/26906Dielectric liner reliability in via-middle through silicon vias with 3 micron diameterJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171630034X