Low-optical-loss, low-resistance Ag/Ge based ohmic contacts to n-type InP for membrane based waveguide devices

Shen, L.L.ShenDolores-Calzadilla, V.V.Dolores-CalzadillaWullems, C.W.H.A.C.W.H.A.WullemsJiao, Y.Y.JiaoMillan-Mejia, A.A.Millan-MejiaHiguera-Rodriguez, A.A.Higuera-RodriguezHeiss, D.D.Heissvan der Tol, J.J.G.M.J.J.G.M.van der TolAmbrosius, H.P.M.M.H.P.M.M.AmbrosiusRoelkens, GuntherGuntherRoelkensSmit, M.K.M.K.Smit2021-10-222021-10-222015-022159-3930https://imec-publications.be/handle/20.500.12860/25894Low-optical-loss, low-resistance Ag/Ge based ohmic contacts to n-type InP for membrane based waveguide devicesJournal articlehttps://www.osapublishing.org/ome/abstract.cfm?uri=ome-5-2-393