Chen, X.X.ChenPreil, M. E.M. E.PreilDussable, MathildeMathildeDussableMaenhoudt, MireilleMireilleMaenhoudt2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5138An automated method for overlay sample plan optimization based on spatial variation modelingProceedings paper