Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysis

Patsis, G.P.G.P.PatsisConstantoudis, V.V.ConstantoudisTserepi, A.A.TserepiGogolides, E.E.GogolidesGrozev, GrozdanGrozdanGrozevHoffmann, ThomasThomasHoffmann2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7985Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysisJournal article