Comparison of RCA and IMEC clean (HF last) type cleaning sequences in full production environment

Wolke, K.K.WolkeSchenkl, M.M.SchenklSilvestre, P.P.SilvestreBellandi, E.E.BellandiAlessandri, M.M.AlessandriCornelissen, IngridIngridCornelissenMeuris, MarcMarcMeuris2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1663Comparison of RCA and IMEC clean (HF last) type cleaning sequences in full production environmentProceedings paper