Towards Si-cap-free SiGe passivation: impact of surface preparation on low-pressure oxidation of SiGe

Wostyn, KurtKurtWostynArimura, HiroakiHiroakiArimuraKimura, YosukeYosukeKimuraHikavyy, AndriyAndriyHikavyyRondas, DirkDirkRondasConard, ThierryThierryConardRagnarsson, Lars-AkeLars-AkeRagnarssonHoriguchi, NaotoNaotoHoriguchi2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37381Towards Si-cap-free SiGe passivation: impact of surface preparation on low-pressure oxidation of SiGeMeeting abstracthttps://doi.org/10.4028/www.scientific.net/SSP.314.49