Stress memorization technique – fundamental understanding and low-cost integration for advanced CMOS technology using a nonselective process

Ortolland, ClaudeClaudeOrtollandOkuno, YasutoshiYasutoshiOkunoVerheyen, PeterPeterVerheyenKerner, ChristophChristophKernerStapelmann, ChrisChrisStapelmannAoulaiche, MarcMarcAoulaicheHoriguchi, NaotoNaotoHoriguchiHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-1820090018-9383https://imec-publications.be/handle/20.500.12860/15950Stress memorization technique – fundamental understanding and low-cost integration for advanced CMOS technology using a nonselective processJournal article