Waeterloos, JoostJoostWaeterloosStruyf, HerbertHerbertStruyfVan Aelst, JokeJokeVan AelstDas, ArabindaArabindaDasCaluwaerts, RudyRudyCaluwaertsAlaerts, CarineCarineAlaertsBoullart, WernerWernerBoullartTokei, ZsoltZsoltTokeiVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/7042Damascene integration feasability of porous SiLK resin filmsProceedings paper